| updated on September 25, 2023 |
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| ROOM 4 | ||
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SCHOOL ON NANOTECHNOLOGIES: |
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| Chairs: Vittorio MORANDI - CV, CNR-IMM & Lorenza FERRARIO, FBK | |||||||||||
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The course is dedicated to Master Degree and Ph.D students, as well as to scientists working in the wide field of micro- and nano-technology, offering the opportunity to learn about fundamentals on processes, devices fabrication and characterization processes, with attention to both planar and 3D technologies. |
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| Wednesday 20 September | |||||||||||
| 09:30 - 09:50 |
Welcome and introduction Lorenza FERRARIO FBK |
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| 09:50 - 10:30 |
PNRR infrastructures Vittorio MORANDI - CV CNR-IMM |
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| 10:30 - 10:50 break | |||||||||||
| 10:50 - 11:35 | Ion implantation - basic technologies: doping1 Antonino PICCIOTTO - CV FBK |
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| 11:35 - 12:20 |
Tecniche alternative per il drogaggio dei semiconduttori - basic technologies: doping2 Michele PEREGO CNR-IMM |
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| 12:20 - 13:00 |
Plasma/etching 1 - basic technologies: etching 1 Fulvio MANCARELLA CNR-IMM |
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| 13:00 - 14:00 light lunch | |||||||||||
| 14:00 - 14:45 | Plasma/etching 2 - basic technologies: etching 2 Fulvio MANCARELLA CNR-IMM |
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| 14:45 - 15:30 | Deposition 1 - basic technologies: deposition1 Riccardo BERTACCO PoliMI/PoliFAB |
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| 15:30 - 16:00 break | |||||||||||
| 16:00 - 16:45 | Deposition 2 - basic technologies: deposition2 Riccardo BERTACCO PoliMI/PoliFAB |
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| Thursday 21 September |
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| 09:00 - 09:45 |
Lithography 1 - basic technologies: litho 1 Massimo CUSCUNA' CNR NANOTEC |
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| 09:45 - 10:30 |
Lithography 2 - basic technologies: litho 2 Massimo CUSCUNÀ CNR NANOTEC |
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| 10:30 - 10:50 break | |||||||||||
| 10:50 - 11:35 |
Litografia basata su copolimeri a blocchi - basic technologies: litho 3 Michele PEREGO & Irdi MURATAJ CNR-IMM, INRiM |
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| 11:35 - 12:20 |
Thermal scanning probe lithography - basic technologies: litho 4 Edoardo ALBISETTI Polytechnic University of Milan |
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| 12:20 - 13:00 | Two photon polymerization and Additive Manufacturing - basic technologies: litho 5 Valentina BERTANA Polytechnic University of Turin |
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| 13:00 - 14:00 light lunch | |||||||||||
| 14:00 - 14:45 | Quantum and nanotechnologies applied to time and frequency metrology - METROLOGY - basic technologies: metrology Giulia APRILE INRiM |
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| 14:45 - 15:30 | Traceable Dimensional Nanometrology by Metrological AFM - basic technologies: metrology2 Luigi RIBOTTA INRiM |
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| Friday 22 September | |||||||||||
| 09:00 - 09:45 |
Advanced materials for the laser particle acceleration and the laser fusion applications: 15 years activity at MNF-FBK - applications 1 Antonino PICCIOTTO - CV FBK |
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| 09:45 - 10:30 | FAIR DATA - OPEN/FAIR Data Francesca DE CHIARA CNR-IMM |
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| 10:30 - 10:50 break | |||||||||||
| 10:50 - 11:35 |
Microfluidics and biosensors - application 2 Simone Luigi MARASSO Polytechnic University of Turin |
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| 11:35 - 12:20 | GaN devices: the new microelectronics era Fabrizio TOIA STM Italy |
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| 12:20 - 12:30 | CLOSURE OF THE SCHOOL | ||||||||||