Demo Event I

The FusionScope
A Unique New Platform for Correlative Microscopy via Combination of AFM and SEM
WORKSHOP & LIVE DEMO

September 20

Correlative microscopy represents an important technique to analyze materials and their properties with spatial correlative resolution. In this context, scanning electron microscopy (SEM) and atomic force microscopy (AFM) are powerful tools to study even smallest features of a sample with nanometer resolution. However, combining these methods is not simple and remains a challenge in terms of the required instrument setups. In most cases, both methods are used separately, and the results obtained can often not be easily correlated afterwards.
The FusionScope - a combination of AFM and SEM - bridges the gap between these two powerful microscopy methods by providing a true correlative instrument design approach coupled with a joint coordinate system. In this workshop, we will demonstrate that a true correlative in-situ analysis of materials - using the FusionScope - is indeed possible.
The workshop will cover in detail the idea, requirements, and benefits of correlative microscopy with this instrument, via a theoretical introduction and a LIVE DEMONSTRATION. We will demonstrate the capability to position the AFM tip precisely on the area of interest using profile view – an 80° eucentric tilt. In addition, we will show how the FusionScope can add true height information to the SEM data, and how the advanced capabilities of a probe-based method such as AFM are beneficial to image material properties that would otherwise be "invisible" or simply inaccessible using other methods.
The workshop will also cover methods of data acquisition and post-processing, as well as the fabrication of high-performance cantilever tips using the focused electron beam induced deposition (FEBID) technique, followed by an introduction to the self-sensing cantilever technology that allows a pure electrical readout of the cantilever deflection signal. Attendance is free but registration is required.